public class Euler734 {
    static final int kMod = 1000000007;

    static int modPow(int base, int exp) {
        long b = base;
        long result = 1;
        while (exp > 0) {
            if ((exp & 1) != 0) {
                result = (result * b) % kMod;
            }
            b = (b * b) % kMod;
            exp >>= 1;
        }
        return (int) result;
    }

    static int[] sievePrimes(int n) {
        boolean[] isPrime = new boolean[n + 1];
        java.util.Arrays.fill(isPrime, 2, n + 1, true);

        for (int p = 2; p * p <= n; ++p) {
            if (isPrime[p]) {
                for (int x = p * p; x <= n; x += p) {
                    isPrime[x] = false;
                }
            }
        }

        int count = 0;
        for (int i = 2; i <= n; i++) {
            if (isPrime[i])
                count++;
        }

        int[] primes = new int[count];
        int idx = 0;
        for (int i = 2; i <= n; i++) {
            if (isPrime[i]) {
                primes[idx++] = i;
            }
        }
        return primes;
    }

    public static String solve() {
        int n = 1000000;
        int k = 999983;

        int bits = 0;
        while ((1 << bits) <= n) {
            ++bits;
        }
        int size = 1 << bits;

        int[] primes = sievePrimes(n);

        int[] g = new int[size];
        for (int p : primes) {
            g[p] = 1;
        }

        for (int b = 0; b < bits; ++b) {
            int bit = 1 << b;
            for (int mask = 0; mask < size; ++mask) {
                if ((mask & bit) == 0)
                    continue;
                int v = g[mask] + g[mask ^ bit];
                if (v >= kMod)
                    v -= kMod;
                g[mask] = v;
            }
        }

        int[] exact = new int[size];
        for (int mask = 0; mask < size; ++mask) {
            exact[mask] = modPow(g[mask], k);
        }

        for (int b = 0; b < bits; ++b) {
            int bit = 1 << b;
            for (int mask = 0; mask < size; ++mask) {
                if ((mask & bit) == 0)
                    continue;
                int v = exact[mask] - exact[mask ^ bit];
                if (v < 0)
                    v += kMod;
                exact[mask] = v;
            }
        }

        int answer = 0;
        for (int p : primes) {
            answer += exact[p];
            if (answer >= kMod)
                answer -= kMod;
        }

        return Integer.toString(answer);
    }

    public static void main(String[] args) {
        System.out.println(solve());
    }
}